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| PartNumber | AT91SAM9XE512-QU | AT91SAM9XE512-CU | AT91SAM9XE512-QU-ES |
| Description | Microprocessors - MPU PQFP IND TEMP | Microprocessors - MPU BGA IND TEMP | |
| Manufacturer | Microchip | Microchip | - |
| Product Category | Microprocessors - MPU | Microprocessors - MPU | - |
| RoHS | Y | Y | - |
| Mounting Style | SMD/SMT | SMD/SMT | - |
| Package / Case | PQFP-208 | BGA-217 | - |
| Series | SAM9XE | SAM9XE | - |
| Core | ARM926EJ-S | ARM926EJ-S | - |
| Number of Cores | 1 Core | 1 Core | - |
| Data Bus Width | 32 bit | 32 bit | - |
| Maximum Clock Frequency | 180 MHz | 180 MHz | - |
| L1 Cache Instruction Memory | 8 kB | 8 kB | - |
| L1 Cache Data Memory | 16 kB | 16 kB | - |
| Operating Supply Voltage | 1.8 V | 1.8 V | - |
| Minimum Operating Temperature | - 40 C | - 40 C | - |
| Maximum Operating Temperature | + 85 C | + 85 C | - |
| Memory Type | Flash, L1 Cache, ROM, SRAM | Flash, L1 Cache, ROM, SRAM | - |
| Brand | Microchip Technology / Atmel | Microchip Technology / Atmel | - |
| Data RAM Size | 32 kB, 512 kB | 32 kB, 512 kB | - |
| Data ROM Size | 32 kB | 32 kB | - |
| Interface Type | 2-Wire, Ethernet, UART, USB | 2-Wire, Ethernet, UART, USB | - |
| Number of I/Os | 96 I/O | 96 I/O | - |
| I/O Voltage | 1.8 V, 3.3 V | 1.8 V, 3.3 V | - |
| Moisture Sensitive | Yes | Yes | - |
| Number of Timers/Counters | 2 x 32 bit | 2 x 32 bit | - |
| Processor Series | AT91SAM | AT91SAM | - |
| Factory Pack Quantity | 96 | 126 | - |
| Watchdog Timers | Watchdog Timer | Watchdog Timer | - |
| Unit Weight | 0.201062 oz | 0.076544 oz | - |